The device for dynamic matching of the E-type discharge plasma system and output tract of electric pulses generator

Abstract

To reduce the reactivity of a glow pulse discharge, the device for stepwise matching of the communication channel of the power stage of electric pulses generator exciting plasma and the plasma discharge as a dynamic load was developed and tested. The peculiarity of this device is the use of a wide range software-controlled inductive element. The use of mixed analog and digital units circuitry provides stable regulation of inductance from 600 μH to 20 mH. Experimental testing of the device with the E-type discharge system at frequencies from 5 kHz to 60 kHz showed a decrease of the phase shift between the current pulses and the discharge voltage and the reduction of the spurious emissions on power pulses trajectories. It makes possible to increase the energy efficiency of plasma process and reliability of the operation of pulse generator with plasma as a load.