Investigation of the stability of microwave discharge in oxygen in a resonator type plasmatron

Abstract

The stability of maintaining microwave discharge in O2 was researched. The results showed that the pulses of registered signals of the integrated optical emission from microwave plasma and of the magnetron current are similar in shape. It was found that under certain regimes of the power supply of the microwave magnetron the pulses of microwave plasma luminescence are characterized by a repetition of their form from cycle to cycle during the process of plasma forming. This allows to provide the reproducibility of duration of microwave plasma chemical materials treatment.