https://libeldoc.bsuir.by/handle/123456789/28415| Title: | Mechanical properties of MEMS components based on anodic aluminum oxide |
| Authors: | Biran, S. A. Korotkevich, D. A. Korotkevich, A. V. |
| Keywords: | материалы конференций;mechanical properties;MEMS;anodic aluminum oxide |
| Issue Date: | 2017 |
| Publisher: | БГУИР |
| Citation: | Biran, S. A. Mechanical properties of MEMS components based on anodic aluminum oxide / S. Biran, D. Korotkevich, A. Korotkevich // Nano-design, technology, computer simulations : proceedings of 17th International workshop on new approaches to high –tech (26-27 October, 2017). – Minsk : BSUIR, 2017. – С. 46 - 49. |
| URI: | https://libeldoc.bsuir.by/handle/123456789/28415 |
| Appears in Collections: | NDTCS 2017 |
| File | Description | Size | Format | |
|---|---|---|---|---|
| Biran_Mechanical.PDF | 362.57 kB | Adobe PDF | View/Open |
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