https://libeldoc.bsuir.by/handle/123456789/28463| Title: | Internal stress in aluminum layers deposited on dielectric substrates for sensor applications |
| Authors: | Shimanovich, D. L. Yakovtseva, V. Sokol, V. Subko, A. |
| Keywords: | материалы конференций;anodic alumina;internal stresses;sensor |
| Issue Date: | 2017 |
| Publisher: | БГУИР |
| Citation: | Internal stress in aluminum layers deposited on dielectric substrates for sensor applications / D. Shimanovich and others // Nano-design, technology, computer simulations : proceedings of 17th International workshop on new approaches to high –tech (26-27 October, 2017). – Minsk : BSUIR, 2017. – С. 40 - 42. |
| Abstract: | In this paper the analysis of the internal stresses in deposited aluminum layers is demonstrated and dependences of the internal stresses on the thickness of the aluminum films deposited at various substrate temperatures and evaporation rates are studied. The study may be applied to fabricate the nanoporous alumina coatings for different kinds of high-sensitive sensors. |
| URI: | https://libeldoc.bsuir.by/handle/123456789/28463 |
| Appears in Collections: | NDTCS 2017 |
| File | Description | Size | Format | |
|---|---|---|---|---|
| Shimanovich_Internal.PDF | 301.84 kB | Adobe PDF | View/Open |
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