| DC Field | Value | Language |
|---|
| dc.contributor.author | Dainiak, I. V. | - |
| dc.contributor.author | Kuznetsov, V. | - |
| dc.contributor.author | Karpovich, S. E. | - |
| dc.date.accessioned | 2018-01-09T12:24:45Z | - |
| dc.date.available | 2018-01-09T12:24:45Z | - |
| dc.date.issued | 2017 | - |
| dc.identifier.citation | Dainiak, I. Calculating and modeling of integrated displacement systems for precision equipment of micro- and nanoelectronics / I. Dainiak, V. Kuznetsov, S. Karpovich // Nano-design, technology, computer simulations : proceedings of 17th International workshop on new approaches to high –tech (26-27 October, 2017). – Minsk : BSUIR, 2017. – С. 161 - 164. | ru_RU |
| dc.identifier.uri | https://libeldoc.bsuir.by/handle/123456789/29058 | - |
| dc.language.iso | en | ru_RU |
| dc.publisher | БГУИР | ru_RU |
| dc.subject | материалы конференций | ru_RU |
| dc.subject | integrated displacement systems | ru_RU |
| dc.subject | precision equipment | ru_RU |
| dc.subject | microelectronics | ru_RU |
| dc.subject | nanoelectronics | ru_RU |
| dc.title | Calculating and modeling of integrated displacement systems for precision equipment of micro- and nanoelectronics | ru_RU |
| dc.type | Статья | ru_RU |
| Appears in Collections: | NDTCS 2017
|
