Nanomaterials for optical microelectromechanical system technology

Abstract

The research is focused on the nanostructured materials processing and their application in microelectromechanical systems (MEMS), in general, and optical MEMS, in particular. In the frame­work of LIGA-like (Lithografie, Galvanoformung, Abforming) technology, anode and cathode cost effective technologies are developed. One of approaches to solve the fundamental problem of friction and wear of MEMS elements is application of the composite materials, in particular, cath­ ode codeposited metal and alloy with inert hard particles by electroless or electrochemical processes. Wear resistance of elements increased in 2-2.5 times, microhardness increased in 2 times, coefficient of friction and corrosion current were reduced by factor 1.5 and 1.6 respectively. Application of composite materials for moveable microelement with high reliability is the only way for real MEMS development. Anodic processes of aluminum and silicon anodizing result in nanopore structure. Anisotropy of the pores determines the unique properties of the films during chemical selective etching and provides aspect ratio up to 50 for MEMS microstructures.