Investigation of method of dynamic microwave power redistribution in a resonator-type plasmatron

Abstract

The investigation results of a dynamic microwave power fmicrowave = 2.45 ± 0.05 GHz redistribution in a 9000 cm3 reaction-discharge chamber of a microwave resonator-type plasmatron are presented. In order to redistribute the microwave power, a rotating metallic four-blade L-form dissector placed above the reaction-discharge chamber was used. The microwave power in the local points at the axis of the chamber with plasma and without it was measured applying the "active probe" method. During the experiments the chamber contained silicon wafers. Periodical interchange of maximum and minimum microwave power values along the chamber axis was established experimentally. Note, when the dissector was rotating, the range of maximum and minimum "active probe" values dispersion decreased. It has been established that during the dissector rotation the microwave power in the local discharge areas changes with periodic repetition every quarter of revolution.