Nanostructuring of the CIGS Films Surface by the Plasma Treatment with Low Ion Energy

Abstract

We report on surface nanostructuring of Cu(In,Ga)Se2 (CIGS) films using inductively coupled argon plasma treatment with the ion energy of 25–30eV within 30–120s. The films were fabricated on glass substrates using the selenization method and had a polycrystalline structure. We demonstrate that the plasma treatment results in the formation of tip-shaped nanostructure arrays with the geometrical parameters controlled by the treatment duration. The features of the surface nanostructuring using low energy ions are discussed.