Design and simulation of 3D magnetic field sensors with integrated magnetic concentrator

Abstract

Today, along with the strong development of the Internet of Things (IoT), new scientific directions are opening up, that is, the development and production of microelectronic sensor devices that combine applications for controlling physical, chemical and biological parameters. Sensors used to measure magnetic field induction have a sensitivity and measurement range limited by the materials used, in addition, their main applications - measuring magnetic fields in a plane, applications in three-dimensional space have many limitations. Therefore, the study of the IC design of a magnetic field sensor in combination with the application of an integrated magnetic concentrator for three-dimensional magnetic field measurement is very relevant.