Studying the influence of microbolometer structure and geometry on the parameters of infrared detectors

Abstract

The influence of the shape and width of the support structure of the device on the operational characteristics of thermal detectors of the bolometric type has been studied. The thermal conductivity of the considered design solutions is relatively low, especially for structure 2 (due to the doubled shoulder width). Type 1 have a higher thermal conductivity than type 2 for the same structure. Moreover, for them the maximum deflection is greater from above, since they are only one film TiN. Structure 2 has the best sensitivity R v . Summarizing all the parameters, it is shown that the microbolometer 2b of structure 2 has the best characteristics.