https://libeldoc.bsuir.by/handle/123456789/50114| Title: | Investigation of thin films MgAl2O4, deposited on the Si substrates by vacuum thermal evaporation |
| Authors: | Stanchik, A. Gremenok, V. Trukhanova, E. L. Khoroshko, V. V. Suleymanov, S. X. Dyskin, V. G. Djanklich, M. U. Kulagina, N. A. Amirov Shakhboz Yo. ugli |
| Keywords: | публикации ученых;thin films;aluminum-magnesium spinel;X-ray structural analysis;microstructure;unit cell parameters;rhombic structure |
| Issue Date: | 2022 |
| Publisher: | Юр-ВАК |
| Citation: | Investigation of thin films MgAl2O4, deposited on the Si substrates by vacuum thermal evaporation / Stanchik A. [et al.] // Computational Nanotechnology. – 2022. – Iss. 1. – P. 125–131. – DOI : 10.33693/2313-223X-2022-9-1-125-131. |
| Abstract: | The article presents data on the study of X-ray structural and microstructural characteristics of thin films of aluminum-magnesium spinel MgAl2O4 deposited on Si substrates by vacuum thermal evaporation. MgAl2O4 films have a polycrystalline rhombic structure. The values of the unit cell parameters of MgAl2O4 are calculated. Scanning electron and atomic force microscopy showed that MgAl2O4 films have a densely packed structure without cracks. Physical characteristics and good adhesion of MgAl2O4 thin films to silicon substrates indicate their possibility of using in devices of opto- and microelectronics. |
| URI: | https://libeldoc.bsuir.by/handle/123456789/50114 |
| Appears in Collections: | Публикации в зарубежных изданиях |
| File | Description | Size | Format | |
|---|---|---|---|---|
| Investigation_of_thin.pdf | 73.38 kB | Adobe PDF | View/Open |
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