Composition-Adjustable Silicon-Germanium Alloy Films based on Porous Silicon Matrices

Abstract

Morphology and crystalline structure of silicon-germanium alloys formed by rapid thermal processing of germanium-filled porous silicon layers are evaluated. Two types of porous silicon are employed as matrices for electrochemical pore filling using GeO2 aqueous solutions and subsequently compared, the first one formed by electrochemical anodization and the second by silver-assisted chemical etching of monocrystalline silicon. The resulting alloys’ structure and composition are investigated using scanning electron microscopy, energy-dispersive X-ray analysis, Raman spectroscopy and X-ray powder diffraction. It is shown that by varying the porosity of the initial matrix (by adjusting anodization current density for anodic porous silicon or changing silver deposition time for structures produced by metal-assisted etching) in the range from 55 to 75%, Si1-xGex alloys with germanium fractions of x = 0.31 to x = 0.83 can be formed, as indicated by Raman spectroscopy. It is concluded that composition-adjustable layers of silicon-germanium can be successfully formed on either type of porous silicon layer. While an increase in porosity generally leads to a decrease in silicon fractions in the alloy, the steepness of this effect varies heavily depending on the type of porous matrix used and should be considered independently for anodic porous silicon and silicon nanowires.