Generation of low-temperature plasma by pulse-width modulated signals and monitoring of the interaction thereof with the surface of objects

Abstract

The article discusses the use of pulse-width modulation signals to generate low-temperature atmospheric plasma in an inert gas environment. The results of studies of the energy consumption of a low-temperature plasma generation system depending on the duty rate, as well as the pulse repetition rate, are presented. The operating modes of the system have been established, in which a minimum of energy consumption is achieved. The issues of evaluating the interaction of plasma with objects based on the analysis of changes in signal parameters in the high-voltage circuit of the generator are also considered.